Detectable Gases
Gas Name Chemical Formula Range Sensor Part Number
Ammonia NH3 0 - 100ppm MIDAS-S-NH3
Arsine AsH3 0 - 0.2ppm MIDAS-S-ASH
Boron Trichloride BCl3 0 - 8.0ppm MIDAS-S-HCL
Boron Trifluoride BF3 0 - 8.0ppm MIDAS-S-HFX
Boron Trifluoride (Low Level) BF3 0 - 2.0ppm MIDAS-S-HFL
Bromine Br2 0 - 0.4ppm MIDAS-S-BR2
Carbon Dioxide CO2 0 - 2.0% vol MIDAS-S-CO2
Carbon Monoxide CO 0 - 100ppm MIDAS-S-COX
Chlorine Cl2 0 - 2.0ppm MIDAS-S-HAL
Chlorine Dioxide ClO2 0 - 0.4ppm MIDAS-S-BR2
Chlorine Trifluoride ClF3 0 - 0.4ppm MIDAS-S-SF4
Diborane B2H6 0 - 0.4ppm MIDAS-S-HYD
Dichlorosilane H2SiCl2 0 - 8.0ppm MIDAS-S-HCL
Difluoromethane CH2F2 0 - 120ppm MIDAS-S-CFX
Disilane Si2H6 0 - 20ppm MIDAS-S-SHX
Fluorine F2 0 - 4.0ppm MIDAS-S-HAL
Germane GeH4 0 - 0.8ppm MIDAS-S-HYD
Hexafluorobutadiene C4F6 0 - 40ppm MIDAS-S-CFX
Hydrogen (% LEL)* H2 0 - 100% LEL MIDAS-S-LEL
Hydrogen (ppm) H2 0 - 1000ppm MIDAS-S-H2X
Hydrogen Bromide HBr 0 - 8.0ppm MIDAS-S-HCL
Hydrogen Chloride HCl 0 - 8.0ppm MIDAS-S-HCL
Hydrogen Cyanide HCN 0 - 20ppm MIDAS-S-HCN
Hydrogen Fluoride HF 0 - 12ppm MIDAS-S-HFX
Hydrogen Fluoride (Low Level) HF 0 - 2.0ppm MIDAS-S-HFL
Hydrogen Sulphide H2S 0 - 40ppm MIDAS-S-H2S
Hydrogen Sulphide (High Level) H2S 0 - 100ppm MIDAS-S-HSH
Methane (% LEL)* CH4 0 - 100% LEL MIDAS-S-LEL
Methyl Fluoride CH3F 0 - 60ppm MIDAS-S-CFX
Nitrogen Dioxide NO2 0 -12ppm MIDAS-S-NO2
Nitrogen Oxide NO 0 - 100ppm MIDAS-S-NOX
Nitrogen Trifluoride NF3 0 - 40ppm MIDAS-S-HFX
Octofluorocyclopentene C5F8 0 - 40ppm MIDAS-S-CFX
Oxygen Proficiency & Deficiency O2 0 - 25% vol MIDAS-S-O2X
Ozone O3 0 - 0.4ppm MIDAS-S-O3X
Phosphine PH3 0 - 1.2ppm MIDAS-S-PH3
Phosphorous Oxychloride POCl3 0 - 0.4ppm MIDAS-S-POC
Silane SiH4 0 - 20ppm MIDAS-S-SHX
Silane (low level) SiH4 0 - 2.0ppm MIDAS-S-SHL
Sulphur Dioxide SO2 0 - 8.0ppm MIDAS-S-SO2
Sulphur Hexafluoride SF6 0 - 8000ppm MIDAS-S-CFX
Sulphur Tetrafluoride SF4 0 - 0.4ppm MIDAS-S-SF4
Tetra Ethyl Ortho Silicate TEOS 0 - 40ppm MIDAS-S-TEO
Tungsten Hexafluoride WF6 0 - 12ppm MIDAS-S-HFX
Tungsten Hexafluoride (Low Level) WF6 0 - 2.0ppm MIDAS-S-HFL
氨 NH3 0-100 ppm MIDAS-S-NH3 氨 氨
砷化三氢 AsH3 0-0.2 ppm MI DAS-S-ASH 砷化三氢 磷化氢
三氯化硼 BCl3 0-8.0 ppm MIDAS-S-HCL 氯化氢 氯
三氟化硼 BF3 0-8.0 ppm MIDAS-S-HFX 氟化氢 氯
溴 Br2 0-0.4 ppm MIDAS-S-BR2 氯 氯
二氧化碳 CO2 0-2.0% vol MIDAS-S-CO2 二氧化碳 二氧化碳
一氧化碳 CO 0-100 ppm MIDAS-S-COX 一氧化碳 一氧化碳
氯 Cl2 0-2.0 ppm MI DAS-S-HAL 氯 氯
二氧化氯 ClO2 0-0.4 ppm MIDAS-S-BR2 氯 氯
三氟化氯 ClF3 0-0.8 ppm MIDAS-S-SF4 氟化氢 氯
硼乙烷 B2 0-0.4 ppm MIDAS-S-HYD 硼乙烷 磷化氢
二氯甲硅烷 H2SiCl2 0-8.0 ppm MIDAS-S-HCL 氯化氢 氯
乙硅烷 Si2H6 0-20 ppm MIDAS-S-SHX 硅烷 硫化氢
氟 F2 0-4.0 ppm MI DAS-S-HAL 氯 氯
锗烷 GeH4 0-0.8 ppm MIDAS-S-HYD Diborane Phosphine
氢 (% LEL) H2 0-100% LEL1 MIDAS-S-LEL 氢 氢
氢(ppm) H2 0-1000 ppm MIDAS-S-H2X 氢 氢
溴化氢 HBr 0-8.0 ppm MIDAS-S-HCL 氯化氢 氯
氯化氢 HCl 0-8.0 ppm MIDAS-S-HCL 氯化氢 氯
氰化氢 HCN 0-20 ppm MIDAS-S-HCN 氰化氢 一氧化碳
氟化氢 HF 0-12 ppm MIDAS-S-HFX 氟化氢 氯
硒化氢 H2Se 0-0.4 ppm MIDAS-S-HSE 硅烷 硫化氢
硫化氢 H2S 0-40 ppm MIDAS-S-H2S 硫化氢 硫化氢
甲烷(% LEL) CH4 0-100% LEL1 MIDAS-S-LEL 氢 氢
二氧化氮 NO2 0-12 ppm MIDAS-S-NO2 二氧化氮 二氧化氮
一氧化氮 NO 0-100 ppm MIDAS-S-NOX 一氧化氮 一氧化氮
三氟化氮 NF3 0-40 ppm MIDAS-S-HFX 氟化氢 氯
氧气重组&不足 O2 0-25% vol MIDAS-S-O2X 氧气 空气
臭氧 O3 0-0.4 ppm MIDAS-S-O3X 臭氧 氯气
磷化氢 PH3 0-1.2 ppm MIDAS-S-PH3 磷化氢 磷化氢
氯氧化磷 POCl3 0-0.8 ppm MIDAS-S-POC 氯化氢 氯
硅烷 SiH4 0-20 ppm MIDAS-S-SHX 硅烷 硫化氢
硅烷(低级别) SiH4 0-2.0 ppm MIDAS-S-SHL 硅烷 硫化氢
二氧化硫 SO2 0-8.0 ppm MIDAS-S-SO2 二氧化硫 二氧化硫
四氟化硫 SF4 0-0.8 ppm MIDAS-S-SF4 氟化氢 氯
正硅酸乙酯 TEOS 0-40 ppm MIDAS-S-TEO TEOS 一氧化碳
六氟化钨 WF6 0-12 ppm MIDAS-S-HFX 氟化氢 氯
