GateKeeper
GPU系列净化器旨在提高工艺气体的一致性、使用寿命和出口纯度。
纯度至 ppt 水平
广泛的气体兼容性，包括腐蚀性气体如Cl2、HBr、HCl、CF4、SO2、SF6
净化器压降低
CE认证符合压力设备指令PED，并在ISO 9001-2000设施中制造
可再生 – 消除处理问题和成本
长寿命 - 改进的拥有成本
使用环境温度净化
OPERATING SPECIFICATIONS
—
Model
Maximum
flow rate
Lifetime is 1
year at this
flow rate,
with 1 ppm
moisture and
1 ppm oxygen
Maximum
operating
pressure –
purifier only
Maximum
operating
pressure –
purifier with
options
Pressure drop,
with 20 μm
particle filter*
Pressure
drop, with
0.0015 μm
particle filter*
GPU 200 20 slpm 1.4 slpm 800 psig 250 psig – 0.7 psid
GPU 300 50 slpm 2.1 slpm 800 psig 250 psig – 1.3 psid
GPU 500 75 slpm 4.3 slpm 600 psig 250 psig – 1.3 psid
GPU 700 120 slpm 6.0 slpm 600 psig 250 psig – 1.8 psid
GPU 2500 4R 300 slpm 22.5 slpm 505 psig 250 psig – 5.0 psid
GPU 2500 8R 500 slpm 22.5 slpm 505 psig 250 psig – 5.6 psid
GPU 3000 500 slpm 26.3 slpm 505 psig 250 psig – 5.6 psid
GPU 5000 500 slpm 42.0 slpm 505 psig 250 psig – 7.0 psid
GPU 10M 8R 1,000 slpm 88.0 slpm 370 psig 250 psig – 5.8 psid
GPU 10M 12R 1,000 slpm 88.0 slpm 370 psig 250 psig – 8.0 psid
GPU 13M 12R 2,000 slpm 107.0 slpm 370 psig 250 psig 2.0 psid –
GPU 13M 16R 2,500 slpm 107.0 slpm 370 psig 250 psig 3.0 psid –
GPU 17M 12R 2,000 slpm 132.0 slpm 370 psig 250 psig 2.0 psid –
GPU 17M 16R 2,500 slpm 132.0 slpm 370 psig 250 psig 3.0 psid –
GPU 20M 12R 2,000 slpm 160.0 slpm 370 psig 250 psig – 19.0 psid
GPU 20M 16R 2,500 slpm 160.0 slpm 370 psig 250 psig – 19.0 psid
*Purifier only at maximum flow rating with 90 psig inlet pressure
4
FACILITY SPECIFICATIONS
—
GPU model
Connection
size (VCR)
Inlet/outlet
connection type
(VCR)
Outside
diameter (OD)
Overall length
(OAL)
Approximate
weight
GPU 200 1/4" Male/male 50.8 mm (2.0") 157 mm (6.2") 0.9 kg (2.0 lbs)
GPU 300 1/4" Male/male 50.8 mm (2.0") 208 mm (8.2") 1.1 kg (2.5 lbs)
GPU 500 1/4" Male/male 76.2 mm (3.0") 201 mm (7.9") 1.8 kg (4.0 lbs)
GPU 700 1/4" Male/male 76.2 mm (3.0") 254 mm (10.0") 2.5 kg (5.5 lbs)
GPU 2500 4R 1/4" Male/male 101.6 mm (4.0") 439 mm (17.3") 6.8 kg (15 lbs)
GPU 2500 8R 1/2" Male/male 101.6 mm (4.0") 445 mm (17.5") 6.8 kg (15 lbs)
GPU 3000 1/2" Male/male 101.6 mm (4.0") 508 mm (20.0") 7.3 kg (16 lbs)
GPU 5000 1/2" Male/male 101.6 mm (4.0") 785 mm (30.9") 10.0 kg (22 lbs)
GPU 10M 8R 1/2" Male/male 152.4 mm (6.0") 737 mm (29.0") 20 kg (44 lbs)
GPU 10M 12R 3/4" Male/male 152.4 mm (6.0") 749 mm (29.5") 21.8 kg (48 lbs)
GPU 13M 12R 3/4" Male/male 152.4 mm (6.0") 892 mm (35.1") 24.9 kg (55 lbs)
GPU 13M 16R 1" Male/male 152.4 mm (6.0") 899 mm (35.4") 24.9 kg (55 lbs)
GPU 17M 12R 3/4" Male/male 152.4 mm (6.0") 1085 mm (42.7") 29.5 kg (65 lbs)
GPU 17M 16R 1" Male/male 152.4 mm (6.0") 1090 mm (42.9") 29.5 kg (65 lbs)
GPU 20M 12R 3/4" Male/male 152.4 mm (6.0") 1290 mm (50.8") 34 kg (75 lbs)
GPU 20M 16R 1" Male/male 152.4 mm (6.0") 1296 mm (51.0") 34 kg (75 lbs)
5
FACILITY SPECIFICATIONS, PURIFIERS WITH ISOLATION VALVES
—
GPU model
Connection
size (VCR)
Inlet/outlet
connection type
(VCR)
Outside
diameter (OD)
Overall length
(OAL) with valves
Approximate
weight with valves
GPU 200 1/4" Female/female 50.8 mm (2.0") 307 mm (12.1") 1.7 kg (3.7 lbs)
GPU 300 1/4" Female/female 50.8 mm (2.0") 358 mm (14.1") 1.8 kg (3.8 lbs)
GPU 300 (GC 300) 1/4" Female/male 83.8 mm (3.3") 401.3 mm (15.8") 2.3 kg (5.1 lbs)
GPU 500 1/4" Female/female 76.2 mm (3.0") 351 mm (13.8") 2.7 kg (6.0 lbs)
GPU 700 1/4" Female/female 76.2 mm (3.0") 404 mm (15.9") 4.4 kg (9.6 lbs)
GPU 2500 4R 1/4" Female/female 101.6 mm (4.0") 592 mm (23.3") 6.8 kg (15 lbs)
GPU 2500 8R 1/2" Female/female 101.6 mm (4.0") 714 mm (28.1") 8.0 kg (17.7 lbs)
GPU 3000 1/2" Female/female 101.6 mm (4.0") 777 mm (30.6") 8.5 kg (18.7 lbs)
GPU 5000 1/2" Female/female 101.6 mm (4.0") 1054 mm (41.5") 12.5 kg (27.6 lbs)
GPU 10M 8R 1/2" Female/male 152.4 mm (6.0") 970 mm (38.2") 22.5 kg (49.6 lbs)
GPU 10M 12R 3/4" Female/female 152.4 mm (6.0") 1125 mm (44.3") 24.9 kg (55.0 lbs)
GPU 13M 12R 3/4" Female/female 152.4 mm (6.0") 1270 mm (50.0") 28.1 kg (62.0 lbs)
GPU 13M 16R 1" Female/female 152.4 mm (6.0") 1308 mm (51.5") 29.5 kg (65.0 lbs)
GPU 17M 12R 3/4" Female/female 152.4 mm (6.0") 1461 mm (57.5") 32.7 kg (72.0 lbs)
GPU 17M 16R 1" Female/female 152.4 mm (6.0") 1499 mm (59.0") 34.0 kg (75.0 lbs)
GPU 20M 12R 3/4" Female/female 152.4 mm (6.0") 1666 mm (65.6") 37.2 kg (82.0 lbs)
GPU 20M 16R 1" Female/female 152.4 mm (6.0") 1705 mm (67.1") 38.6 kg (85.0 lbs)
现货美国ENTEGRIS纯化器
GPUS500FIX04R02CA
GPUS2500FIX04R02CA
GPUS2500FHX04R02CA
GPUS700FYX04R02CA
全新未拆封，带隔离阀
现货美国ENTEGRIS纯化器
GPUS500FIX04R02CA
GPUS2500FIX04R02CA
GPUS2500FHX04R02CA
GPUS700FYX04R02CA
全新未拆封，带隔离阀